Today’s semiconductor processes face extreme reliability and yield expectations. You need to ensure that the purity of the process and equipment availability is up to your expectations. Air Products is the best partner of choice for global semiconductor manufacturers. We offer a broad portfolio of ultra-high purity carrier gases, equipment, and services to help you achieve the highest standard of consistent and reliable semiconductor manufacturing processes.
The only ultra-high purity gases which guarantee the lowestlevels of critical impurity levels of 10ppb oxygen and 20ppb moisture.
The only ultra-high purity gases which guarantee the lowestlevels of critical impurity levels of 10ppb oxygen and 20ppb moisture.
Air Products' high purity neon and neon-fluorine mixtures areideal for excimer lasers and other laser applications for semiconductormanufacturing.
Air Products high-purity xenon is ideal as an atmosphere, plasmaand as an ion beam source for etching and deposition.
Can you provide guidance on the proper gas purification system for my semiconductor fabrication site?
There is no one system that can purify all your process gases at one time. Depending on the gas to be purified, the impurities that have to be removed, the flow rate and the required final purity, there are different types of purifiers available from large back pad systems to small point of use systems. We can assist you in deciding on the correct system for your requirements.