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Semiconductors
We assist you to reach the next node level in your wafer fabrication process
Today’s semiconductor processes face extreme reliability and yield expectations. You need to ensure that the purity of the process and equipment availability is up to your expectations. Air Products is the best partner of choice for global semiconductor manufacturers. We offer a broad portfolio of ultra-high purity carrier gases, equipment, and services to help you achieve the highest standard of consistent and reliable semiconductor manufacturing processes.
What Gases Do We Supply For Semiconductor Fabrication?
BIP® Nitrogen
The only ultra-high purity gases which guarantee the lowestlevels of critical impurity levels of 10ppb oxygen and 20ppb moisture.
BIP® Argon
The only ultra-high purity gases which guarantee the lowestlevels of critical impurity levels of 10ppb oxygen and 20ppb moisture.
Neon
Air Products' high purity neon and neon-fluorine mixtures areideal for excimer lasers and other laser applications for semiconductormanufacturing.
Xenon
Air Products high-purity xenon is ideal as an atmosphere, plasmaand as an ion beam source for etching and deposition.
Global leading gas supplier for Semiconductors
Our core capabilities of product, equipment, and service include:
- Various supply modes, including onsite generation, bulk supply and microbulk supply
- Ultra high purity carrier gases, including nitrogen, oxygen, hydrogen, helium and argon
- Ultra high purity process gases, rare gases and gas mixtures
- Design, manufacture and installation of all related equipment
- Excellent record of meeting on-time needs
- Industry leader in safety
- Technical expertise
- World-class customer service
Xenon Recovery
- Xenon is a high-value material that can be recovered, purified, then reused
- Xeon Recovery is Air Products proprietary/patented technology that was developed to recover xeon from semiconductor fab’s tool exhaust stream
- Concept developed by leveraging Air Products experience in adsorption technologies
- Operation and maintenance at customer site
Ask the Expert
“Can you provide guidance on the proper gas purification system for my semiconductor fabrication site?”
There is no one system that can purify all your process gases at one time. Depending on the gas to be purified, the impurities that have to be removed, the flow rate and the required final purity, there are different types of purifiers available from large back pad systems to small point of use systems. We can assist you in deciding on the correct system for your requirements.
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